DEVICE FOR FABRICATING ALIGNMENT LAYER

摘要

A device for fabricating an alignment layer includes a chamber, a conveying means, deposition device, and an ion beam alignment device. The conveying means is arranged in the chamber and serves to carry the substrate. The deposition device is arranged above the conveying means in the chamber and serves to form the layer. The ion beam alignment device is arranged above the conveying means in the chamber, and serves to perform the alignment of the layer. The deposition device and the ion beam alignment device can be replaced with an ion beam deposition/alignment device so that the formation and alignment of the layer can be performed in a chamber.