| 发明名称 |
BOAT FOR HEAT TREATMENT AND VERTICAL HEAT TREATMENT EQUIPMENT |
| 摘要 |
A boat for heat treatment characterized by comprising a plurality of columns, a plurality of pawl parts formed in respective columns at a specified interval in the height direction, a plurality of supporting plates each having a plane for mounting an article being treated and fixed, in multi-stage, between the plurality of columns through the pawl part, and grooves and through holes made in the plane for mounting the article. Since grooves and through holes are made in the plane for mounting the article, an air layer is formed between the plane of the supporting plate for mounting the article and the article and thereby the article can be prevented from sticking. Consequently, slip due to sticking of the article can be prevented even at a high-temperature heat treatment.
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| 申请公布号 |
WO03060968(A1) |
申请公布日期 |
2003.07.24 |
| 申请号 |
WO2002JP09512 |
申请日期 |
2002.09.17 |
| 申请人 |
TOKYO ELECTRON LIMITED;IRIE, SHINJI;SAKAI, HIROFUMI |
发明人 |
IRIE, SHINJI;SAKAI, HIROFUMI |
| 分类号 |
C23C16/458;C23C16/46;H01L21/00;H01L21/205;H01L21/22;H01L21/31;H01L21/673;H01L21/683;(IPC1-7):H01L21/205;H01L21/68 |
主分类号 |
C23C16/458 |
| 代理机构 |
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代理人 |
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