| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing machine capable of water-proofing a guide mechanism and a drive mechanism of an X table without use of a seal member such as bellows or the like in the upper portion of an oil pan, as well as facilitating cleaning of the coil pan and preventing lowering the availability of the dicing machine. SOLUTION: The dicing machine comprises: the oil pan 50 disposed in the lower portion of a work table 25 for collecting waste fluid of grinding fluid and cleaning fluid; a guide means 28 for guiding an X table 27 in X directions, and a drive means 31 for driving the X table 27 for grinding in the X directions, both means 28 and 31 being disposed outside the oil pan 50; and suspending members 27A and 27B for suspending the work table 27 in the oil pan 50, which are connected to the guide means 28 and the drive means 31. Because the work table 25 is suspended in the oil pan 50, no opening is necessary to be formed in the bottom of the oil pan 50, nor bellows are required for sealing the opening, thereby allowing easier cleaning of the oil pan due to elimination of the bellows. COPYRIGHT: (C)2003,JPO |
