| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve a processing accuracy and manufacturing yield of an optical waveguide by decreasing the flatness of the rear side of a substrate to be processed in forming the optical waveguide by processing the substrate to be processed which is made of an optical material from the rear side to be processed. <P>SOLUTION: An adhered body 5C is manufactured by adhering the rear face 1a of the substrate to be processed 1D which is made of the optical material and the adhering face 4c of a supporting substrate 4C under a heated condition. Next, the rear face 4d of the supporting substrate 4C is adhered and fixed to a fixing substrate 8 and the substrate to be processed 1A is processed from the side of the face 1d to be processed to thereby form the optical waveguide. Prior to the adhesion of the substrate to be processed 1D and the supporting substrate 4C, films 2 and 6 are deposited under a heated condition on at least one of the rear face 1a of the substrate to be processed 1D, the processed face 1b of the substrate to be processed 1D, the adhered face 4c of the supporting substrate 4 and the rear face 4d of the supporting substrate 4, thus the flatness of the rear face 1c of the substrate 1A after an adhered body 5A is adhered to the fixing substrate 8 is adjusted. <P>COPYRIGHT: (C)2003,JPO</p> |
