| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly take out a polished workpiece from a carrier stopped in a carrying-out position by a conveyer, after polishing is finished. <P>SOLUTION: This polisher provided with a sun gear 16 provided near the central part in a lower surface plate 12 and an upper surface plate 30 rotating independently, an internal gear 18 provided apart from outer circumferential edges of the lower surface plate and the upper surface plate, and the conveyer for carrying in and out the workpiece in a through-hole formed in the plate-like carrier 14 of which the teeth formed in its outer circumferential edge are meshed with the gear to be rotated is provided with a detection sensor 22 for detecting a positioning hole existing in an extruded portion A stopped in the workpiece carrying-in and-out position, using the carrier of which the positioning holes are provided intermittently in a periphery along the outer circumferential edge to make the positioning hole 19 for indicating a position of the through-hole exist in the extruded portion A, and a control means for controlling the workpiece carrying-in and-out, by the conveyer, to the through-hole of the carrier specified based on the detected positioning hole. <P>COPYRIGHT: (C)2003,JPO |
