| 摘要 |
PROBLEM TO BE SOLVED: To provide a negatively charged atom generator having a high degree off freedom in arranging a reaction field and good conveniences, allowing an increase in the amount of a space current to be generated with a low voltage. SOLUTION: The negatively charged atom generator comprises a negatively charged atom extraction part consisting of a solid electrolyte layer having the property of conducting negatively charged atoms, first and second electrodes arranged with the solid electrolyte layer held therebetween, an insulating layer formed on the first electrode and an extraction electrode formed on the insulating layer. The negatively charged atom extraction part has a hole or groove, establishing that a t/d value is 0.1 or more, preferably 1.0 or more, where d is the diameter of the inscribed circle of the hole or groove and t is the thickness of the insulating layer. COPYRIGHT: (C)2003,JPO
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