| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming apparatus of plating film for constantly and accurately monitoring the composition of a plating liquid by a simple method, and to provide a controlling method of the forming apparatus. SOLUTION: The plating film-forming apparatus comprises a plating-forming bath 1 for performing plating inside, a plating liquid replenishment bath 2 for adjusting the plating liquid to be used in the plating-forming bath 1, a horizontal channel 3 as a channel for connecting the plating-forming bath 1 to the plating liquid replenishment bath 2 so that the plating liquid can be circulated, an X-ray tube 5 for applying X rays toward the plating liquid in the channel, and an X-ray detector 6 for detecting fluorescent X rays radiated from the plating liquid in the channel. COPYRIGHT: (C)2003,JPO
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