| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting method for an object to be measured capable of realizing surface inspection of a center and a center neighborhood where surface inspection is impossible in a constant scanning line system. SOLUTION: First surface inspection of an outer circumferential part other than the center and the center neighborhood where surface inspection is impossible is carried out by rotating the discoidal object to be measured around the center O (conventional surface inspection). Then a rotation center O' is deviated from the center O of the discoidal object to be measured, and second surface inspection including the center O and the neighborhood of the center O of the object to be measured where surface inspection could not be carried out by the first surface inspection is carried out. Whole surface inspection including the center and the center neighborhood of the object to be measured is realized by synthesis of first and second surface inspection results. COPYRIGHT: (C)2003,JPO
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