METHOD OF MANUFACTURING OPTICAL DEVICE, AND OPTICAL DEVICE
摘要
An optical device with less chipping on the front surface and the rear surface end parts of a substrate and a method of manufacturing the optical device, the method comprising the steps of stamping dicing tape on the rear surface of the substrate having a large number of optical elements formed on the surface thereof and dicing by a blade from the front surface side of the substrate, wherein the dicing is dividedly performed multiple times by using the blade performing a proper self-sharpening action; the optical device having optical elements on the front surface of the substrate characterized in that the maximum size of chipping in the vertical direction of the rear surface of the substrate relative to a cutting surface is 0.1 mm or less.
申请公布号
WO03049165(A1)
申请公布日期
2003.06.12
申请号
WO2002JP12763
申请日期
2002.12.05
申请人
HITACHI CHEMICAL CO.,LTD.;KURODA, TOSHIHIRO;TAKAHASHI, TOORU;KIKUCHI, HIROAKI;YAGI, SHIGEYUKI