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发明名称
METHOD FOR FORMING TRENCH MOSFET DEVICE WITH LOW PARASITIC RESISTANCE
摘要
申请公布号
AU2002357746(A1)
申请公布日期
2003.06.10
申请号
AU20020357746
申请日期
2002.11.20
申请人
GENERAL SEMICONDUCTOR, INC.
发明人
FWU-IUAN HSHIEH;KOON, CHONG SO;JOHN, E. AMATO;BRIAN, D. PRATT
分类号
H01L21/336;H01L21/8234;H01L29/10;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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