| 摘要 |
PROBLEM TO BE SOLVED: To provide an electret silicon capacitor microphone and a method for manufacturing this. SOLUTION: This electret silicon capacitor microphone is composed of a composite layer diaphragm chip, a fixed electrode chip, and a case, and the composite layer diaphragm chip is provided with a diaphragm (for converting a voice into mechanical vibration), an electrode layer (for providing voltage propagation), an electret layer (for providing a charge), and a spacer (for providing a vibrating space). The fixed electrode chip is provided with an electrode layer (for providing voltage propagation), an air hole, an air chamber (for providing air dumping), and a MOSFET (for providing resistance matching). The composite layer diaphragm chip is combined with the fixed electrode chip so as to be made to correspond to each other, and packaged by the case so that this electret silicon capacitor microphone can be formed. COPYRIGHT: (C)2003,JPO
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