发明名称 SEMICONDUCTOR COMPONENT HANDLING DEVICE HAVING A PERFORMANCE FILM
摘要 The present invention relates generally to a system and method for including a thin protective containment thermopolymer film, such as PEEK, in the molding process for handlers, transporters, carriers, trays and like devices utilized in the semiconductor processing industry. The thermoplastic film of predetermined size and shape is selectively placed along a shaping surface in a mold cavity for alignment with a desired target surface of a moldable material. The molding process causes a surface of the film to bond to a contact surface of the moldable material such that the film is permanently adhered to the moldable material. As a result, a compatible polymer film can be selectively bonded only to those target surfaces where performance characteristics such as abrasion resistance, heat resistance, chemical resistance, outgassing containment, rigidity enhancement, hardness, creep reduction, fluid absorption containment, and the like is needed.
申请公布号 WO03046950(A2) 申请公布日期 2003.06.05
申请号 WO2002US37860 申请日期 2002.11.26
申请人 ENTEGRIS, INC.;BHATT, SANJIV, M.;EGGUM, SHAWN, D. 发明人 BHATT, SANJIV, M.;EGGUM, SHAWN, D.
分类号 B65D85/86;B29C45/14;B29K101/12;B29L9/00;B65H1/28;H01L21/673 主分类号 B65D85/86
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