| 摘要 |
PURPOSE: A heat treatment device for a liquid crystal display device composed of a plastic film-MIM(Metal Insulator Metal element) is provided to individually control heaters and exhaust units and circulate coolant in a holder at a constant speed, thereby carrying out the high and low heat treatment for the MIM and the PF substrate simultaneously. CONSTITUTION: A heat treatment device for a liquid crystal display device composed of a plastic film-MIM includes upper heating elements(11) mounted on a holder(13) in a container(10) for heating an object, and thermal flow covers(12) mounted at an upper part of a side surface of the holder. The thermal flow covers guide the thermal flow transmitted from the upper heating element to the holder for increasing the heat efficiency, and keep the temporal difference between upper and lower parts of the object in the container. The heating elements are formed of a plurality of heaters controllable independently.
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