| 摘要 |
<p>A circuit switching switch (60) having a drive device (10), comprising ceramic pumps (18a) and (18b), wherein a conductive movable body (110) is moved in a flow passage (13a) by alternately pressurizing and depressurizing, by the pumps, working fluid (100) in the flow passage (13a) on the right and left sides of the movable body (110) to electrically conduct either of switching electrodes (62a) and (62b) to a common electrode (61), the movable body is surely moved since fine flow passages (16a) and (16b) provides a large flow passage resistance when the pressure of the working fluid is rapidly raised and lowered by the pumps to prevent the pressure inside the passages from reliving into an inner pressure damping chamber (15a), whereas, since the fine passages provide a small flow passage resistance against a gentle pressure rise due to the thermal expansion of the working fluid, the fine flow passages lead the expanded amount of the working fluid into the inner pressure damping chamber to suppress the rise of pressure of the working fluid, whereby a drive device capable of preventing a pump chamber or seals from being damaged even if the working fluid is thermally expanded can be provided.</p> |
