| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus, in which measured results are rapidly fed back by automatically measuring the thickness of a work and automatically rewriting the work data stored in a memory. SOLUTION: This dicing apparatus 10 comprises a measuring means 51 that measures the thickness of the work W placed on a worktable 25 and a work- data rewriting means 52 that feedbacks the work thickness measured by the measuring means 51 to the work data stored beforehand. Thereby, the thickness of the work W is automatically measured, and the measured result is automatically registered to the work data or correction of the registration is automatically made. The thickness measurement means 51 is constituted by a non-contact laser length-measuring device 51A and a thickness-calculating means 51B, wherein the laser length-measuring device 51A is attached on a biobjective microscope 12, enabling measurement of the whole surface. |
