GAS SUPPLYING APPARATUS AND METHOD THEREFOR, AND FILM FORMING APPARATUS AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To individually supply each raw material of solution by vaporizing each material under an optimum vaporizing condition at the time of forming a composite metal oxide film by a solution vaporizing method using a multiple metal compound as the raw material. SOLUTION: The composite metal oxide film is formed by the reaction of gas composed of a plurality of multiple metal compounds and oxidation agent gas by introducing the gas into a film forming chamber 62 via a shower plate 64. The solution including a plurality of multiple metal compounds is individually vaporized with a vaporizer. The gas composed of a plurality of multiple metal compounds supplied from the vaporizer is uniformly mixed by a gas mixing unit 76 and then supplied to the shower plate 64.