发明名称 MICROWAVE PLASMA GENERATOR
摘要 <p>A microwave plasma generator including field-enhancing electrodes consisting of opposed laminae (108,109) with a gap (110) between them orthogonal to the direction of propagation through the plasma generator of microwave radiation. Gas inlet (106) and outlet (107) ports are arranged so that a gaseous medium to be excited into the plasma state passes through the gap (110).</p>
申请公布号 WO2003041111(A1) 申请公布日期 2003.05.15
申请号 GB2002004865 申请日期 2002.10.25
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