METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring particle size in a region of 1000 nm or below. SOLUTION: Content of particles having a specified particle size contained in a matter being measured is determined by obtaining a scattering X-ray spectrum based on small-angle X-ray scattering method from the matter being measured, determining the Y-intercept a line group having an inclination corresponding to a specified particle size such that the error is minimized when the scattering X-ray spectrum is approximated by linear combination of the line group, and determining the existing quantity of particles corresponding to the specified particle size from the inclination of the Y-intercept.