High-temperature ultrapure water production apparatus and liquid medicine preparation apparatus equipped with the production apparatus

摘要

A high-temperature ultrapure water production apparatus comprises an evaporator 22 for treating pretreated water obtained by a pretreating system or primary pure water obtained by a primary pure water system 21 to prepare ultrapure water having a high temperature, an ion exchanger 23 for removing trace metal ions from the ultrapure water obtained by the evaporator 22, a product water heat exchanger 24 made of titanium for subjecting to heat exchange the high-temperature ultrapure water obtained by the evaporator 22 and containing the trace metal ions unremoved therefrom and the ultrapure water having ordinary temperature and having its trace metal ions removed by treatment by the ion exchanger 23, a cooling heat exchanger 25 made of SUS for cooling to not higher than 40° C. the ultrapure water containing the unremoved trace metal ions and cooled by the product water heat exchanger 24 for use as feed water for the ion exchanger 23.