| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet head capable of improving assembly precision by effectively preventing over-etching of an insulation layer. SOLUTION: The ink-jet head comprises: a head substrate 1 constituted by fixing an insulation layer 3 containing oxidized silicon as a major component; a plurality of heating resistors 5 and a protective layer 7 sequentially onto an upper surface of a base plate 2 made of single crystal silicon; bulkhead members 8 placed on the protective layer 7 between the heating resistors 5-5 partly adjacent to each other and separating the heating resistors 5 and 5 adjacent to each other at the placing part; and a top plate 9 being placed on the bulkhead members 8 and covering ink channels surrounded by a top surface of the head substrate 1 and the wall surfaces of the bulkhead members 8. An undercoat layer 4 containing silicon nitride as a major component is interposed between the insulation layer 3 of the head substrate 1 and the heating resistors 5 over the area where a plurality of the heating resistors are arranged.
|
