| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring apparatus with a wide dynamic range even with one sensor. SOLUTION: The three-dimensional shape measuring apparatus uses a confocus detection method in which a measuring object is illuminated, reflection light is focus-detected with a line sensor (14) and the shape of the measuring object is measured. The focus lens group (12f) reciprocatingly scans for focus detection. A first and a second memories (M1, M2) record a part of output from the line sensor (14) as data, and forwards the data to a third memory (M3) after finishing the reciprocating scan. An operation control system (22) directs a pre-operation block (21) a switching of going way scan and returning way scan by signal (α), and performs an operation for detecting the focus for every pixel during the reciprocal scan by using the recorded data in the third memory (M3). A CCD drive system (23) has an electronic shutter function and switches measuring sensitivity of the going way scan and the returning way scan to a specific ratio.
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