发明名称 METHOD AND DEVICE FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT
摘要 PROBLEM TO BE SOLVED: To solve problems in a conventional manufacturing device that accurate control of a component ratio changing in the direction of thickness of a film is difficult and production of uniform products is impossible because, for example, a difference in light emitting colors occurs in each product. SOLUTION: A manufacturing method for an organic electroluminescent element having an inclined organic layer composed of a plurality of organic compounds of at least one layer between opposing anode electrode and cathode electrode and having different mixture ratios in the direction of thickness is provided to manufacture the inclined organic layer by moving a substrate 11 relatively for a plurality of evaporation sources 3 of the organic compound arranged across a partition plate 5 in the same vacuum film formation chamber 2. Moreover, a manufacturing device 1 for the organic electroluminescent element is provided to enable accurate control of a component ratio.
申请公布号 JP2003077662(A) 申请公布日期 2003.03.14
申请号 JP20020178461 申请日期 2002.06.19
申请人 KIDO JUNJI 发明人 KIDO JUNJI
分类号 H05B33/10;C23C14/12;C23C14/24;H01L51/50;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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