| 摘要 |
Method for measuring vibrations in small and microscopic objects, The method comprises use of a calculation algorithm with the collection of more data sets or data images from a detector array, such that these data sets or data images are used to calculate the size of the interference modulation between the interfering light waves, while the object at the same time is vibrated at a frequency, and while a reference light or object light at the same time is phase modulated at the same frequency. Furthermore, use of a calculation algorithm based on that the said calculation of the modulation is done several times at a different vibration phase between the excitation of the object on one hand and reference modulation or the phase modulation of the object light on the other hand. Finally, the method comprises use of a calculation algorithm based on use of the results from the said calculation of the modulation to calculate amplitude values and phase values for the vibration of the surface of the object.
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