| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection device which can perform focusing operation fast and shorten a tact time for capturing the enlarged image of a substrate to be inspected. SOLUTION: The device is equipped with an optical unit 30 equipped with an objective 43 for observing the object to be inspected with specific magnification and a stage 20 for inspection which supports the object to be inspected and can control the position of the object to be inspected about the objective 43 with a specific movement quantity, and the optical unit 30 has a piezoelectric element 46 which can control the position of the objective 43 about the object to be inspected with a movement quantity smaller than the movement quantity by a Z stage 23 of the stage 20 for inspection. |
