INK JET HEAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem that it is difficult to ensure discrete electrodes and a common electrode when they are formed by making slits in a multilayer piezoelectric element. SOLUTION: Discrete electrodes 22, 22,... are formed on an insulating substrate 3 while being divided by slit grooves 21 connecting a drive section piezoelectric element 7 and a fixed section piezoelectric element 8 on the side of end faces not facing each other. A common groove 23 deeper than the slit groove is made between respective piezoelectric element arrays 4 and 4 in the direction perpendicular to the slit grooves 21. A common electrode 24 for connecting individual drive section piezoelectric elements 7 and fixed section piezoelectric elements 8 on the side of end faces facing each other is formed in the common groove 23.