HIGH-FREQUENCY DECOMPRESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To make the device small and of low cost by making a structure of an impedance matching circuit simple. SOLUTION: A power synthesizing circuit 107 to combine outputs of a plurality of high-frequency power supplies 105, 106 is provided, from the output of which, input impedance of an impedance matching circuit is made decreased by supplying high-frequency power to an electrode 103 through an impedance converting circuit 108.