AIR CURRENT GENERATING APPARATUS INSTALLED IN SEMICONDUCTOR FABRICATING AREA

摘要

PURPOSE: An air current generating apparatus installed in a semiconductor fabricating area is provided to reduce a dead point portion in which air does not circulate, by controlling the direction of supplied air current. CONSTITUTION: An air supplying terminal(110) sprays circulated air on a particular area. A variable apparatus(120) can control the direction of the circulated air sprayed from the air supplying terminal. An air introducing terminal(130) has an air current control plate for dispersing an air path so that air current is not formed in the lower portion and drift current is not formed in the lower portion having the air path, installed in a position opposite to the air supplying terminal. An air circulation path(140) connects the air introducing terminal with the air supplying terminal. A circulation fan(150) is installed in the end of the air circulation path.