| 摘要 |
PROBLEM TO BE SOLVED: To use, e.g. a member made of titanium excellent in corrosion resistance as a press ring, and to secure easy processing of the press ring and uniform and sufficient strength (stiffness) along the length (periphery) of the press ring. SOLUTION: In a substrate holder 18 which holds a substrate W so as to be freely attached and detached by disposing the substrate W between a fixed holding member 54 and a movable holding member 58, and rotating the press ring 62 in one direction so as to press the movable holding member 58 toward the fixed holding member 54, the press ring 62 is held by the movable holding member 58 in such a manner that the press ring 62 is freely rotatable and not detached, through a slide plate 64 which is fixed to the press ring 62 and has an engaging part 64c engaging with an engaging part 58e provided at the outer peripheral face of the movable holding member 58.
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