| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device for adhering a filter for air pressure adjusting hole with extremely high position precision without causing the adhesion of any foreign matter to the filter or the damage of the filter. SOLUTION: The device for adhering a filter 5a for an air pressure adjusting hole to a pellicle frame 5c is provided with a means for peeling the edge part of the filter 5a for the air pressure adjusting hole attached on a separator 5b, a holding means for holding the filter 5a for the air pressure adjusting hole whose edge part is peeled, and a moving means for completely removing the filter 5a for the air pressure adjusting hole from the separator 5b by moving the holding means, and for moving and adhering the filter 5a for the air pressure adjusting hole to the prescribed position of the pellicle fame 5c.</p> |
