APPARATUS FOR HANDLING SUBSTRATE

摘要

PURPOSE: An apparatus for handling a substrate is provided to confirm easily an aligning state of a contacted substrate in a handling process of the substrate by using a contact part and a confirmation portion. CONSTITUTION: A handling device(10) includes a contact portion(100) contacted with a substrate. The contact portion(100) is contacted with a rear face of the substrate. The contact portion(100) has various shapes such as a shape of fork, a shape of fan, and a shape of plate. The handling device(10) has an alignment confirmation portion(110a) in order to confirm a contact state between the substrate and the contact portion(100). The alignment confirmation portion(110a) is installed on the inside of contact portion(100). The handling device(10) has an alignment confirmation portion(110b) in order to confirm an aligning state of the contacted substrate.