发明名称 FABRICATION INTEGRATION OF MICRO-COMPONENTS
摘要 <p>Fabrication Integration of Micro-Components. A method for manufacturing a first and second micro-component on a surface of a substrate, including fabricating a first and second constraint structure. The first and second constraint structures are subtantially formed to fit a surface of the first and second micro-component, respectively, for positioning the first and second micro-components with respect to each other. The method includes fabricating the first and second micro-components in separate processes. The first and second micro-components have a surface substantially formed to fit the first and second constraint structures, respectively.</p>
申请公布号 WO2002097767(A2) 申请公布日期 2002.12.05
申请号 US2002000679 申请日期 2002.01.08
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