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发明名称
SILICON SUBNITRIDE METHOD FOR PRODUCTION AND USE OF SAID SUBNITRIDE
摘要
<p>Die Erfindung betrifft ein neues Siliciumsubnitrid, ein Verfahren zu dessen Herstellung sowie die Verwendung des erfindungsgemässen Subnitrids.</p>
申请公布号
WO2002096799(A2)
申请公布日期
2002.12.05
申请号
EP2002005733
申请日期
2002.05.24
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
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