发明名称 |
APPARATUS AND METHOD FOR HANDLING AND TESTING OF WAFERS |
摘要 |
Embodiments provide an apparatus and method permitting the handling of a semiconductor wafer while maintaining the vacuum applied to the relevant wafer handling equipment continuously in an actuated state. These embodiments provide more gentle wafer handling with reduced contamination risk. One embodiment provides a passive end effector. Another embodiment provides a holder, for an object such as semiconductor wafer, that utilizes Bernoulli-type forces to retain the object against the holder. |
申请公布号 |
WO0213244(A3) |
申请公布日期 |
2002.11.28 |
申请号 |
WO2001US41404 |
申请日期 |
2001.07.25 |
申请人 |
QC SOLUTIONS, INC. |
发明人 |
KAMIENIECKI, EMIL;SAUER, JEFFREY;FLEMING, JONATHAN;KAMIENIECKI, KRYSZTOF;LEMAY, CHARLES, R. |
分类号 |
H01L21/683;H01L21/687 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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