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发明名称
Substrate inspection apparatus and method therefore
摘要
申请公布号
EP0826969(B1)
申请公布日期
2002.11.20
申请号
EP19970115019
申请日期
1997.08.29
申请人
NIDEC-READ CORPORATION
发明人
NISHIKAWA, HIDEO
分类号
G01R31/02;G01R1/073;G01R31/00;G01R31/28;(IPC1-7):G01R1/073
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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