发明名称 |
Method and apparatus for measuring thickness variation of a thin sheet material, and probe reflector used in the apparatus |
摘要 |
Optical displacement gauges 20 are respectively arranged on both sides of a thin sheet material w, and displacement of surface position of the thin sheet material w is measured by irradiating measurement light L1 to the surface of the thin sheet material w. Thickness variation of the thin sheet material w is obtained from the measurement results of displacement of the surface position of the thin sheet material w.
|
申请公布号 |
US6480286(B1) |
申请公布日期 |
2002.11.12 |
申请号 |
US20000533652 |
申请日期 |
2000.03.22 |
申请人 |
MATSUSHITA ELECTRIC INUDSTRIAL CO., LTD. |
发明人 |
KUBO KEISHI;YOSHIZUMI KEIICHI;IMADA YUKIO;TAKEUCHI HIROYUKI;HANDA KOJI |
分类号 |
G01B11/06;G01B11/30;G01B21/08;G01B21/30;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|