发明名称 IMPROVED SALICIDE BLOCK FOR SILICON-ON-INSULATOR (SOI) APPLICATIONS
摘要 <p>A method is provided, the method comprising forming a buffer layer (440) above a structure layer (420), and forming a dielectric layer (450) above the buffer layer (440). The method also comprises patterning the dielectric layer (450) to form a salicide block (600) above a portion of the structure layer (420) protecting the portion from a subsequent salicidation. A device is also provided, the device comprising a buffer layer (440) above a structure layer (420) and a dielectric layer (450) above the buffer layer (440). The dielectric layer (450) is patterned to form a salicide block above a portion of the structure layer ( 420) to protect the portion from a subsequent salicidation.</p>
申请公布号 WO2002089201(A1) 申请公布日期 2002.11.07
申请号 US2002002845 申请日期 2002.02.01
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