发明名称 CERAMIC HEATER
摘要 PROBLEM TO BE SOLVED: To provide a ceramic heater which has excellent resistance to corro sion by corrosive gas. SOLUTION: This is the ceramic heater in which a resistance heating element and an electric conductor electrically connected with the above resistance heating element are formed inside a ceramic board. The above resistance heating element and the above electric conductor are not exposed, and are laid inside the ceramic board, and a coil is wound and formed around the circumference of the above resistance heating element or the above electric conductor.
申请公布号 JP2002319476(A) 申请公布日期 2002.10.31
申请号 JP20010123271 申请日期 2001.04.20
申请人 IBIDEN CO LTD 发明人 ITO YASUTAKA;SUGIMOTO KEIZO
分类号 H05B3/00;C04B35/581;H01L21/02;H01L21/66;H05B3/10;H05B3/18;H05B3/68;H05B6/02 主分类号 H05B3/00
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