PROCESSING SOLUTION REPLENISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To rationally constitute a processing solution replenishing device capable of accurately grasping the excess supply of a processing solution to a stock part. SOLUTION: The processing solution replenishing device is provided with an upper limit sensor SL for setting up a detection level to a position higher than the liquid surface level of a stock tank ST filled with the whole quantity of the processing solution stored in a cartridge C when the liquid surface of the processing solution of the stock tank ST is a set level or less and detecting the liquid surface of the processing solution. When the liquid surface is detected by the sensor SL, the filling of the processing solution is stopped and a message indicating abnormality is displayed on a display.