发明名称 |
Embedded LSI having a FeRAM section and a logic circuit section |
摘要 |
An embedded LSI includes a FeRAM macro block and an associated logic circuit section. A hydrogen barrier layer covers the FeRAM macro block as a whole and exposes the logic circuit section. The edge of the hydrogen barrier layer overlies the peripheral circuit of the FeRAM macro block and the boundary separating the FeRAM macro block from the logic circuit section. The ferroelectric capacitor is protected by the hydrogen barrier layer against hydrogen during a hydrogen-annealing process.
|
申请公布号 |
US6465826(B2) |
申请公布日期 |
2002.10.15 |
申请号 |
US20010752950 |
申请日期 |
2001.01.02 |
申请人 |
NEC CORPORATION |
发明人 |
KASAI NAOKI |
分类号 |
H01L21/822;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;(IPC1-7):H01L29/76;H01L27/108 |
主分类号 |
H01L21/822 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|