发明名称 SPUTTER PALLET LOADER
摘要 A loading and unloading device (100) includes a spindle (104) that rotates a pallet (102) while an arm (110) is engaged with the spring (104) in the pallet (102) to open and close the spring or alternatively, the spring is adjacent an air track including an air elevating portion (119). Once raised into the loading area, the spring is closed. The simplicity of operation leads to a reduced cost and a higher throughput for this device compared to a robotic loader.
申请公布号 WO02074668(A1) 申请公布日期 2002.09.26
申请号 WO2002US07574 申请日期 2002.03.12
申请人 TODA CITRON TECHNOLOGIES, INC. 发明人 ADAM, JOHANN, F.;CROMWELL, EVAN, F.
分类号 B65G49/05;B65G49/07;C23C14/56;G11B5/84;G11B7/26;G11B17/08;G11B17/22;G11B23/00;H01L21/677;H01L21/683;(IPC1-7):B65G53/08 主分类号 B65G49/05
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