发明名称 |
METHOD OF ACTUATING MEMS SWITCHES |
摘要 |
A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.
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申请公布号 |
WO02075427(A1) |
申请公布日期 |
2002.09.26 |
申请号 |
WO2001US08431 |
申请日期 |
2001.03.16 |
申请人 |
OPTICAL COATING LABORATORY, INC. |
发明人 |
HICHWA, BRYANT;FRIEDRICH, DONALD;DUELLI, MARKUS |
分类号 |
G02B26/02;(IPC1-7):G02B26/02 |
主分类号 |
G02B26/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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