| 摘要 |
PROBLEM TO BE SOLVED: To prevent reduction of foaming of a heater constituting layer and adhesion strength so that thermal conductivity does not deteriorate or a sliding property does not deteriorate, as for a ceramic heater obtained by pattern- forming and calcining the heater constituting layers 32 to 38, 40, 41 on one face or both faces of a sintered-molded ceramic insulated substrate 31. SOLUTION: Immediately before pattern-forming the heater constituting layers 32 to 38, 40, 41 on the insulated substrate 31, only the insulated substrate 31 is heat-treated at 500 deg.C to 1,100 deg.C. |
