发明名称 LIGHT SOURCE DEVICE, LIGHT ILLUMINATING DEVICE AND EXPOSURE DEVICE, AND DEVICE PRODUCING METHOD
摘要 <p>A non-linear optical crystal (189), onto which a light with a first wavelength and a light with a second wavelength are coaxially shone, efficiently produces from the first-wavelength light a third light being a second higher harmonic thereof by non-critical phase matching or pseudo phase matching and almost coaxially outputs the second-wavelength light and the third-wavelength light. Therefore, a non-linear optical crystal (191) in the latter stage can efficiently produce a sum frequency without using optical path adjusting components for phase matching required in producing a sum frequency of the second-wavelength light and the third-wavelength light, enabling an efficient production of wavelength-converted light with a simple configuration.</p>
申请公布号 WO2002071143(P1) 申请公布日期 2002.09.12
申请号 JP2002001968 申请日期 2002.03.04
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址