PARTS OF APPARATUS FOR PLASMA TREATMENT AND METHOD FOR MANUFACTURE THEREOF, AND APPARATUS FOR PLASMA TREATMENT

摘要

Parts of an apparatus for plasma treatment which is to be disposed inside of the body of the apparatus and to be exposed to a plasma atmosphere (a focus ring, a shield ring, a protecting ring, a shielding member, and a first or second bellows cover), characterized in that they are formed of one of a polybenzimidazole material having been subjected to a drying treatment, a sintered ceramic material and a material containing a silicon oxide as a primary component and another material specified.