| 摘要 |
<p>A multi-dimensional scanning probe microscopy tool is provided by the present invention. This multi-dimensional scanning probe microscopy tool includes an atomic force microscope (AFM) cantilever (68) coupled to a tip (72), wherein the tip (72) deflects the cantilever (68) in response to an interaction with a sample (64). The cantilever (68) is illuminated by a collimated light beam (74,88) generated by a collimated light source (66, 62). The collimated light (74, 88) is reflected by the top surface of the cantilever (78) towards a position sensitive detector (PSD) (60) placed in the path of the reflected collimated light beam (80, 86). The PSD (60) produces an output containing data representing a deflection of the cantilever (68). This output is processed by a data acquisition and control system to produce a representation of the interaction with the sample.</p> |
