| 摘要 |
PROBLEM TO BE SOLVED: To realize stable and high-speed rotation of a polishing head body when the head body is rotated, while downsizing a polishing device as a whole. SOLUTION: In the polishing head body, a tape reel on which a polishing tape is wound, and a winding reel for winding the polishing tape drawn from the tape reel are rotatably supported. A pressing part is set in between the tape reel and the winding reel, and the polishing tape is looped there. The pressing part in which the polishing tape is looped is made to contact a polishing object placed on a polishing table so that the polishing object is polished. The tape reel and the winding reel are supported by the polishing head body in such a manner that their flat side surfaces are opposed to each other nearly symmetrically across a line orthogonal to the pressing surface of the pressing part, and that the distance between the tapes on the pressing side is narrower than that on the opposite side of the pressing part. |
