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发明名称
Halbleiterinspektionssystem
摘要
申请公布号
DE69429748(T2)
申请公布日期
2002.08.08
申请号
DE19946029748T
申请日期
1994.07.18
申请人
HAMAMATSU PHOTONICS K.K., HAMAMATSU
发明人
INUZUKA, EIJI;OGURI, SHIGEHISA;SUZUKI, KOUJI;NAGATA, WATARU;HIRUMA, YASUSHI
分类号
G01N21/63;G01N21/88;G01N21/956;H01L21/66;(IPC1-7):G01N21/88;G01R31/311;H04N3/15
主分类号
G01N21/63
代理机构
代理人
主权项
地址
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