发明名称 ISOLATION REGION OF SEMICONDUCTOR HIGH VOLTAGE DEVICE AND FABRICATING METHOD THEREOF
摘要 PURPOSE: An isolation region of a semiconductor high voltage device is provided to prevent an inversion region caused by minority carriers from being formed under a field oxide layer, by forming a poly electrode of the field oxide layer when a gate electrode is formed without performing an additional process or increasing the area of the isolation region. CONSTITUTION: An active region and a field region are defined in a substrate. The first conductive well(42) to which a ground voltage is applied is formed in the substrate including the active region. A high density body contact region(44) of the first conductivity type is formed in the first conductive well, isolated from the active region. A field insulation layer is formed in the field region. A transistor having a source/drain and a gate electrode(45a,45b) is formed in each active region. A semiconductor electrode is formed on the filed insulation layer between the adjacent active regions while the gate electrode is formed. A ground voltage applying electrode(48a) is in contact with the source or drain in one portion of the active region. A high voltage applying electrode(48b) connects the source or drain in the other portion of the active region with the gate electrode in the active region adjacent to the source/drain. A body contact electrode(48c) connects the semiconductor electrode with the body contact region.
申请公布号 KR20020056386(A) 申请公布日期 2002.07.10
申请号 KR20000085735 申请日期 2000.12.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JU, JAE IL
分类号 H01L21/76;(IPC1-7):H01L21/76 主分类号 H01L21/76
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