| 摘要 |
<p>A method of producing an organic EL element having a good element performance by preventing the degeneration of an organic EL material when the organic EL material is vapor-deposited on a substrate, and a device using the method. A method of vapor-depositing an organic EL element which uses an organic EL element vapor-depositing device, in which the materials of organic-material-deposited components such as a chamber or a shutter (5), (6), in addition to a film forming substrate, consist of inactive ones that do not degenerate the organic material in an organic EL thin film depositing process that vaporizes the organic EL material in an evaporation source, and deposits it on a film forming substrate (4) to form a thin film.</p> |
