发明名称 PICKER INTERVAL CONTROL APPARATUS OF HORIZONTAL HANDLER
摘要 PURPOSE: A picker interval control apparatus of a horizontal handler is provided, which controls an interval between pickers accurately and freely without regard to a size of a device by controlling the interval between pickers by driving a step motor. CONSTITUTION: According to the picker interval control apparatus, a slider(22) screwed to a lead screw moves along an X direction according to the driving of a driving unit and an elevation piece(23) is combined to the slider. The second lead screw(25) is screwed to the elevation piece, and a driving motor(26) drives the second lead screw by being installed on the slider. A timing belt(29) is wound between a driving pulley(27) and a following pulley(28) fixed to a driving axis of the driving motor. A sensing unit controls the driving of the driving motor by sensing a top dead center(TDC) and a bottom dead center(BDC) of the elevation piece. At least one fixed picker(32) is installed below the elevation piece, and at least one operation picker(33) is installed to move horizontally along the second guide rail installed on a bottom of the elevation piece.
申请公布号 KR20020049848(A) 申请公布日期 2002.06.26
申请号 KR20000079149 申请日期 2000.12.20
申请人 NAE IL SYSTEM CO., LTD. 发明人 SUL, DAE HWAN
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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